full list 22.11.2017:

ISO 13067:2011 Microbeam analysis -- Electron backscatter diffraction -- Measurement of average grain size
ISO 15632:2012 Microbeam analysis -- Selected instrumental performance parameters for the specification and checking of energy-dispersive X-ray spectrometers for use in electron probe microanalysis
ISO 22029:2012 Microbeam analysis -- EMSA/MAS standard file format for spectral-data exchange
ISO 22309:2011 Microbeam analysis -- Quantitative analysis using energy-dispersive spectrometry (EDS) for elements with an atomic number of 11 (Na) or above
ISO 24173:2009 Microbeam analysis -- Guidelines for orientation measurement using electron backscatter diffraction

ISO 15932:2013 Microbeam analysis -- Analytical electron microscopy -- Vocabulary
ISO 22493:2014 Microbeam analysis -- Scanning electron microscopy -- Vocabulary
ISO 23833:2013 Microbeam analysis -- Electron probe microanalysis (EPMA) -- Vocabulary

ISO 11938:2012 Microbeam analysis -- Electron probe microanalysis -- Methods for elemental-mapping analysis using wavelength-dispersive spectroscopy
ISO 14594:2014 Microbeam analysis -- Electron probe microanalysis -- Guidelines for the determination of experimental parameters for wavelength dispersive spectroscopy
ISO 14595:2014 Microbeam analysis -- Electron probe microanalysis -- Guidelines for the specification of certified reference materials (CRMs)
ISO 16592:2012 Microbeam analysis -- Electron probe microanalysis -- Guidelines for determining the carbon content of steels using a calibration curve method
ISO 17470:2014 Microbeam analysis -- Electron probe microanalysis -- Guidelines for qualitative point analysis by wavelength dispersive X-ray spectrometry
ISO 22489:2016 Microbeam analysis -- Electron probe microanalysis -- Quantitative point analysis for bulk specimens using wavelength dispersive X-ray spectroscopy

ISO 19214:2017 Microbeam analysis -- Analytical electron microscopy -- Method of determination for apparent growth direction of wirelike crystals by transmission electron microscopy
ISO 25498:2010 Microbeam analysis -- Analytical electron microscopy -- Selected-area electron diffraction analysis using a transmission electron microscope
ISO 29301:2010 Microbeam analysis -- Analytical transmission electron microscopy -- Methods for calibrating image magnification by using reference materials having periodic structures

ISO 16700:2016 Microbeam analysis -- Scanning electron microscopy -- Guidelines for calibrating image magnification
ISO/TS 24597:2011 Microbeam analysis -- Scanning electron microscopy -- Methods of evaluating image sharpness


the missing:

ISO 19214:2017 Microbeam analysis -- Analytical electron microscopy -- Method of determination for apparent growth direction of wirelike crystals by transmission electron microscopy


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