update:

better quality:

ISO 3529-1:1981 Vacuum technology -- Vocabulary -- Part 1: General terms
ISO 3529-2:1981 Vacuum technology -- Vocabulary -- Part 2: Vacuum pumps and related terms
ISO 5302:2003 Vacuum technology -- Turbomolecular pumps -- Measurement of performance characteristics


same 2 still missing here:

ISO 1608-1:1993 Vapour vacuum pumps -- Measurement of performance characteristics -- Part 1: Measurement of volume rate of flow (pumping speed)
ISO 1608-2:1989 Vapour vacuum pumps -- Measurement of performance characteristics -- Part 2: Measurement of critical backing pressure


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